Using SEM to Solve Routine TEM Problems

Abstract number
Corresponding Email
[email protected]
EMAG - Energy Materials
Dr Simon Burgess (1), Dr Haithem Mansour (1), Dr Louise Hughes (1), Dr Kim Larsen (1), Dr Matt Hiscock (1)
1. Oxford Instruments

TEM STEM  SEM EDS TKD Elemental analysis EBSD Microstructure

Abstract text

STEM-SEM is an imaging mode available across most SEMs and FIB-SEMs, offering high spatial resolutions of < 10nms for both imaging and EDS mapping. This is achieved by analyzing electron transparent samples, samples that would typically be viewed in a TEM, and utilizing the nominally < 100 nm sample thickness to enhance our spatial resolution and reduce interaction volume. A technique that has yet to be widely adopted across the microscopy community we feel that STEM-SEM provides a strong alternative to traditional TEM and STEM for many routine applications. It has shown to be extremely effective when analysing features with sizes between 3 and 100 nm, whilst requiring significantly less column alignment and faster turn around when imaging a range of samples. In this technobite we will discuss the latest innovations for analysing the elemental composition (EDS) and micro-structure (TKD) of samples at the nano-scale using a SEM.


Fig. 1. Elemental characterisation of a additively manufactured nanostructure using low kV SEM, 30kV STEM-SEM and 200kV STEM