Large volume three dimensional correlative microscopy
- Abstract number
- 63
- Corresponding Email
- [email protected]
- Session
- Stream 3: Volume Microscopy in Physical and Life Sciences
- Authors
- Professor Philip Withers (1), Dr Jack Donoghue (1), Dr Alistair Garner (1, 2), Dr Ali Gholinia (1), Dr Xiangli Zhong (1), Dr Tim Burnett (1)
- Affiliations
-
1. Henry Royce Institute, Department of Materials, University of Manchester
2. Jacobs
- Keywords
X-ray computed tomography
multiscale imaging
scanning electron microscopes
correlative workflow
- Abstract text
Recent advances in X-ray computed tomography (CT) have significantly advanced the level of information that can be obtained non-destructively about materials structures at scales from the meso (>10mm), micro (down to sub-micron) and nano scales (down to tens of nm). Alongside this, advances in serial sectioning tomography using scanning electron microscopes (SEM) combined with focused ion (FIB), plasma ion beam (PFIB) or pulsed laser milling has extended the level of (microstructural, crystallographic or chemical) information that can be obtained destructively in 3D over volumes from 50micron, to 200micron to 1mm volumes respectively.
This talk will examine the current state of the art in large volume and multiscale imaging through a series of examples bringing together X-ray CT and serial section SEM imaging across a wide range of different materials applications. Through these examples we will discuss both the practical aspects relating to correlative workflows but also the issues and opportunities relating to the co-visualisation and analysis of correlative datasets. In particular we will examine the potential of emerging triple beam microscopes (bringing together laser- plasma focused ion and electron beams) in extending significantly the volume of materials that can be imaged in 3D at SEM spatial resolutions to the mm scale, complementing 3D imaging with 3D EBSD and 3D chemical mapping.
In summary, this combination of X-ray imaging and 3D electron microscopy has a very wide potential from experimental steering, through to the multiscale imaging of metals and other engineering materials, through energy and device materials to fixed biological samples.
- References